High-κ Ir/TiTaO/TaN capacitors suitable for analog IC applications

High-κ Ir/TiTaO/TaN capacitors suitable for analog IC applications

10.1109/LED.2005.851241

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Bibliographic Details
Main Authors: Chiang, K.C., Huang, C.C., Chin, A., Chen, W.J., McAlister, S.P., Chiu, H.F., Chen, J.-R., Chi, C.C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Analog
Ir
ITRS
MIM
TiTaO
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82472
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Institution: National University of Singapore
id sg-nus-scholar.10635-82472
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spelling sg-nus-scholar.10635-824722023-10-26T21:46:56Z High-κ Ir/TiTaO/TaN capacitors suitable for analog IC applications Chiang, K.C. Huang, C.C. Chin, A. Chen, W.J. McAlister, S.P. Chiu, H.F. Chen, J.-R. Chi, C.C. ELECTRICAL & COMPUTER ENGINEERING Analog Ir ITRS MIM TiTaO 10.1109/LED.2005.851241 IEEE Electron Device Letters 26 7 504-506 EDLED 2014-10-07T04:29:48Z 2014-10-07T04:29:48Z 2005-07 Article Chiang, K.C., Huang, C.C., Chin, A., Chen, W.J., McAlister, S.P., Chiu, H.F., Chen, J.-R., Chi, C.C. (2005-07). High-κ Ir/TiTaO/TaN capacitors suitable for analog IC applications. IEEE Electron Device Letters 26 (7) : 504-506. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2005.851241 07413106 http://scholarbank.nus.edu.sg/handle/10635/82472 000230150400026 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Analog
Ir
ITRS
MIM
TiTaO
spellingShingle Analog
Ir
ITRS
MIM
TiTaO
Chiang, K.C.
Huang, C.C.
Chin, A.
Chen, W.J.
McAlister, S.P.
Chiu, H.F.
Chen, J.-R.
Chi, C.C.
High-κ Ir/TiTaO/TaN capacitors suitable for analog IC applications
description 10.1109/LED.2005.851241
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Chiang, K.C.
Huang, C.C.
Chin, A.
Chen, W.J.
McAlister, S.P.
Chiu, H.F.
Chen, J.-R.
Chi, C.C.
format Article
author Chiang, K.C.
Huang, C.C.
Chin, A.
Chen, W.J.
McAlister, S.P.
Chiu, H.F.
Chen, J.-R.
Chi, C.C.
author_sort Chiang, K.C.
title High-κ Ir/TiTaO/TaN capacitors suitable for analog IC applications
title_short High-κ Ir/TiTaO/TaN capacitors suitable for analog IC applications
title_full High-κ Ir/TiTaO/TaN capacitors suitable for analog IC applications
title_fullStr High-κ Ir/TiTaO/TaN capacitors suitable for analog IC applications
title_full_unstemmed High-κ Ir/TiTaO/TaN capacitors suitable for analog IC applications
title_sort high-κ ir/titao/tan capacitors suitable for analog ic applications
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/82472
_version_ 1781784146207571968

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