High-κ Ir/TiTaO/TaN capacitors suitable for analog IC applications

• Main Authors: Chiang, K.C., Huang, C.C., Chin, A., Chen, W.J., McAlister, S.P., Chiu, H.F., Chen, J.-R., Chi, C.C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: Analog; Ir; ITRS; MIM; TiTaO
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/82472
• Institution: National University of Singapore

10.1109/LED.2005.851241