Influence of substitutional carbon incorporation on implanted-indium-related defects and transient enhanced diffusion

10.1063/1.1628814

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Bibliographic Details
Main Authors: Tan, C.F., Chor, E.F., Liu, J., Lee, H., Quek, E., Chan, L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82539
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Institution: National University of Singapore