Influence of substitutional carbon incorporation on implanted-indium-related defects and transient enhanced diffusion

• Main Authors: Tan, C.F., Chor, E.F., Liu, J., Lee, H., Quek, E., Chan, L.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/82539
• Institution: National University of Singapore

10.1063/1.1628814