Influence of substitutional carbon incorporation on implanted-indium-related defects and transient enhanced diffusion
10.1063/1.1628814
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Main Authors: | Tan, C.F., Chor, E.F., Liu, J., Lee, H., Quek, E., Chan, L. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82539 |
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Institution: | National University of Singapore |
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