Interface properties and reliability of ultrathin oxynitride films grown on strained Si1-xGex substrates

10.1063/1.1540224

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Bibliographic Details
Main Authors:	Samanta, S.K., Chatterjee, S., Maikap, S., Bera, L.K., Banerjee, H.D., Maiti, C.K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82555
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-825552024-11-08T19:05:23Z Interface properties and reliability of ultrathin oxynitride films grown on strained Si1-xGex substrates Samanta, S.K. Chatterjee, S. Maikap, S. Bera, L.K. Banerjee, H.D. Maiti, C.K. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1540224 Journal of Applied Physics 93 5 2464-2471 JAPIA 2014-10-07T04:30:45Z 2014-10-07T04:30:45Z 2003-03-01 Article Samanta, S.K., Chatterjee, S., Maikap, S., Bera, L.K., Banerjee, H.D., Maiti, C.K. (2003-03-01). Interface properties and reliability of ultrathin oxynitride films grown on strained Si1-xGex substrates. Journal of Applied Physics 93 (5) : 2464-2471. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1540224 00218979 http://scholarbank.nus.edu.sg/handle/10635/82555 000181307000022 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.1540224
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Samanta, S.K. Chatterjee, S. Maikap, S. Bera, L.K. Banerjee, H.D. Maiti, C.K.
format	Article
author	Samanta, S.K. Chatterjee, S. Maikap, S. Bera, L.K. Banerjee, H.D. Maiti, C.K.
spellingShingle	Samanta, S.K. Chatterjee, S. Maikap, S. Bera, L.K. Banerjee, H.D. Maiti, C.K. Interface properties and reliability of ultrathin oxynitride films grown on strained Si1-xGex substrates
author_sort	Samanta, S.K.
title	Interface properties and reliability of ultrathin oxynitride films grown on strained Si1-xGex substrates
title_short	Interface properties and reliability of ultrathin oxynitride films grown on strained Si1-xGex substrates
title_full	Interface properties and reliability of ultrathin oxynitride films grown on strained Si1-xGex substrates
title_fullStr	Interface properties and reliability of ultrathin oxynitride films grown on strained Si1-xGex substrates
title_full_unstemmed	Interface properties and reliability of ultrathin oxynitride films grown on strained Si1-xGex substrates
title_sort	interface properties and reliability of ultrathin oxynitride films grown on strained si1-xgex substrates
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82555
_version_	1821220083142230016

Interface properties and reliability of ultrathin oxynitride films grown on strained Si1-xGex substrates

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