Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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Bibliographic Details
Main Authors:	Chua, C.S., Chor, E.F., Goh, F., See, A., Chan, L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82567
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82567
record_format	dspace
spelling	sg-nus-scholar.10635-825672023-11-01T08:04:45Z Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors Chua, C.S. Chor, E.F. Goh, F. See, A. Chan, L. ELECTRICAL & COMPUTER ENGINEERING Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 20 6 2288-2294 JVTBD 2014-10-07T04:30:54Z 2014-10-07T04:30:54Z 2002-11 Article Chua, C.S., Chor, E.F., Goh, F., See, A., Chan, L. (2002-11). Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 20 (6) : 2288-2294. ScholarBank@NUS Repository. 0734211X http://scholarbank.nus.edu.sg/handle/10635/82567 000180307300021 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Chua, C.S. Chor, E.F. Goh, F. See, A. Chan, L.
format	Article
author	Chua, C.S. Chor, E.F. Goh, F. See, A. Chan, L.
spellingShingle	Chua, C.S. Chor, E.F. Goh, F. See, A. Chan, L. Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors
author_sort	Chua, C.S.
title	Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors
title_short	Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors
title_full	Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors
title_fullStr	Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors
title_full_unstemmed	Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors
title_sort	investigation of active si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82567
_version_	1781784172265734144

Investigation of active Si pitting and its impact on 0.15 and 0.30 μm n-type metal-oxide-semiconductor and p-type metal-oxide-semiconductor transistors

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