Investigation of quasi-breakdown mechanism through post-quasi-breakdown thermal annealing

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

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Main Authors:	Loh, W.Y., Cho, B.J., Li, M.F.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Quasi-breakdown (QB) Stress-induced leakage current (SILC) Thermal annealing and gate oxide reliability Thin gate oxide
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82578
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82578
record_format	dspace
spelling	sg-nus-scholar.10635-825782015-01-07T22:55:33Z Investigation of quasi-breakdown mechanism through post-quasi-breakdown thermal annealing Loh, W.Y. Cho, B.J. Li, M.F. ELECTRICAL & COMPUTER ENGINEERING Quasi-breakdown (QB) Stress-induced leakage current (SILC) Thermal annealing and gate oxide reliability Thin gate oxide Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 41 5 A 2873-2877 JAPND 2014-10-07T04:31:01Z 2014-10-07T04:31:01Z 2002-05 Article Loh, W.Y.,Cho, B.J.,Li, M.F. (2002-05). Investigation of quasi-breakdown mechanism through post-quasi-breakdown thermal annealing. Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers 41 (5 A) : 2873-2877. ScholarBank@NUS Repository. 00214922 http://scholarbank.nus.edu.sg/handle/10635/82578 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Quasi-breakdown (QB) Stress-induced leakage current (SILC) Thermal annealing and gate oxide reliability Thin gate oxide
spellingShingle	Quasi-breakdown (QB) Stress-induced leakage current (SILC) Thermal annealing and gate oxide reliability Thin gate oxide Loh, W.Y. Cho, B.J. Li, M.F. Investigation of quasi-breakdown mechanism through post-quasi-breakdown thermal annealing
description	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Loh, W.Y. Cho, B.J. Li, M.F.
format	Article
author	Loh, W.Y. Cho, B.J. Li, M.F.
author_sort	Loh, W.Y.
title	Investigation of quasi-breakdown mechanism through post-quasi-breakdown thermal annealing
title_short	Investigation of quasi-breakdown mechanism through post-quasi-breakdown thermal annealing
title_full	Investigation of quasi-breakdown mechanism through post-quasi-breakdown thermal annealing
title_fullStr	Investigation of quasi-breakdown mechanism through post-quasi-breakdown thermal annealing
title_full_unstemmed	Investigation of quasi-breakdown mechanism through post-quasi-breakdown thermal annealing
title_sort	investigation of quasi-breakdown mechanism through post-quasi-breakdown thermal annealing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82578
_version_	1681089278033002496

Investigation of quasi-breakdown mechanism through post-quasi-breakdown thermal annealing

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