Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching

Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching

10.1007/s00339-010-5807-9

Saved in:
Bibliographic Details
Main Authors: Liu, C.H., Hong, M.H., Lum, M.C., Flotow, H., Ghadessy, F., Zhang, J.B.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82600
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore
Description
Summary:10.1007/s00339-010-5807-9

Similar Items