Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching

10.1007/s00339-010-5807-9

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Bibliographic Details
Main Authors:	Liu, C.H., Hong, M.H., Lum, M.C., Flotow, H., Ghadessy, F., Zhang, J.B.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82600
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82600
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spelling	sg-nus-scholar.10635-826002023-10-26T08:07:46Z Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching Liu, C.H. Hong, M.H. Lum, M.C. Flotow, H. Ghadessy, F. Zhang, J.B. ELECTRICAL & COMPUTER ENGINEERING CHEMISTRY 10.1007/s00339-010-5807-9 Applied Physics A: Materials Science and Processing 101 2 237-241 APAMF 2014-10-07T04:31:17Z 2014-10-07T04:31:17Z 2010-11 Article Liu, C.H., Hong, M.H., Lum, M.C., Flotow, H., Ghadessy, F., Zhang, J.B. (2010-11). Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching. Applied Physics A: Materials Science and Processing 101 (2) : 237-241. ScholarBank@NUS Repository. https://doi.org/10.1007/s00339-010-5807-9 09478396 http://scholarbank.nus.edu.sg/handle/10635/82600 000283088600003 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1007/s00339-010-5807-9
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Liu, C.H. Hong, M.H. Lum, M.C. Flotow, H. Ghadessy, F. Zhang, J.B.
format	Article
author	Liu, C.H. Hong, M.H. Lum, M.C. Flotow, H. Ghadessy, F. Zhang, J.B.
spellingShingle	Liu, C.H. Hong, M.H. Lum, M.C. Flotow, H. Ghadessy, F. Zhang, J.B. Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching
author_sort	Liu, C.H.
title	Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching
title_short	Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching
title_full	Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching
title_fullStr	Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching
title_full_unstemmed	Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching
title_sort	large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82600
_version_	1781784180419461120

Large-area micro/nanostructures fabrication in quartz by laser interference lithography and dry etching

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