Low thermal budget monolithic integration of evanescent-coupled Ge-on-SOI photodetector on Si CMOS platform

Low thermal budget monolithic integration of evanescent-coupled Ge-on-SOI photodetector on Si CMOS platform

10.1109/JSTQE.2009.2025142

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Bibliographic Details
Main Authors: Ang, K.-W., Liow, T.-Y., Yu, M.-B., Fang, Q., Song, J., Lo, G.-Q., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
CMOS circuit
Germanium
Integrated photonics
Near infrared
Photodetector
Silicon-on-insulator (SOI)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82631
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Institution: National University of Singapore
Description
Summary:10.1109/JSTQE.2009.2025142

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