Low thermal budget monolithic integration of evanescent-coupled Ge-on-SOI photodetector on Si CMOS platform

• Main Authors: Ang, K.-W., Liow, T.-Y., Yu, M.-B., Fang, Q., Song, J., Lo, G.-Q., Kwong, D.-L.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Article
• Published: 2014
• Subjects: CMOS circuit; Germanium; Integrated photonics; Near infrared; Photodetector; Silicon-on-insulator (SOI)
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/82631
• Institution: National University of Singapore

10.1109/JSTQE.2009.2025142