Low thermal budget monolithic integration of evanescent-coupled Ge-on-SOI photodetector on Si CMOS platform

Low thermal budget monolithic integration of evanescent-coupled Ge-on-SOI photodetector on Si CMOS platform

10.1109/JSTQE.2009.2025142

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Bibliographic Details
Main Authors: Ang, K.-W., Liow, T.-Y., Yu, M.-B., Fang, Q., Song, J., Lo, G.-Q., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
CMOS circuit
Germanium
Integrated photonics
Near infrared
Photodetector
Silicon-on-insulator (SOI)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82631
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Institution: National University of Singapore
id sg-nus-scholar.10635-82631
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spelling sg-nus-scholar.10635-826312023-10-26T09:47:38Z Low thermal budget monolithic integration of evanescent-coupled Ge-on-SOI photodetector on Si CMOS platform Ang, K.-W. Liow, T.-Y. Yu, M.-B. Fang, Q. Song, J. Lo, G.-Q. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING CMOS circuit Germanium Integrated photonics Near infrared Photodetector Silicon-on-insulator (SOI) 10.1109/JSTQE.2009.2025142 IEEE Journal on Selected Topics in Quantum Electronics 16 1 106-113 IJSQE 2014-10-07T04:31:39Z 2014-10-07T04:31:39Z 2010-01 Article Ang, K.-W., Liow, T.-Y., Yu, M.-B., Fang, Q., Song, J., Lo, G.-Q., Kwong, D.-L. (2010-01). Low thermal budget monolithic integration of evanescent-coupled Ge-on-SOI photodetector on Si CMOS platform. IEEE Journal on Selected Topics in Quantum Electronics 16 (1) : 106-113. ScholarBank@NUS Repository. https://doi.org/10.1109/JSTQE.2009.2025142 1077260X http://scholarbank.nus.edu.sg/handle/10635/82631 000274382900013 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic CMOS circuit
Germanium
Integrated photonics
Near infrared
Photodetector
Silicon-on-insulator (SOI)
spellingShingle CMOS circuit
Germanium
Integrated photonics
Near infrared
Photodetector
Silicon-on-insulator (SOI)
Ang, K.-W.
Liow, T.-Y.
Yu, M.-B.
Fang, Q.
Song, J.
Lo, G.-Q.
Kwong, D.-L.
Low thermal budget monolithic integration of evanescent-coupled Ge-on-SOI photodetector on Si CMOS platform
description 10.1109/JSTQE.2009.2025142
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Ang, K.-W.
Liow, T.-Y.
Yu, M.-B.
Fang, Q.
Song, J.
Lo, G.-Q.
Kwong, D.-L.
format Article
author Ang, K.-W.
Liow, T.-Y.
Yu, M.-B.
Fang, Q.
Song, J.
Lo, G.-Q.
Kwong, D.-L.
author_sort Ang, K.-W.
title Low thermal budget monolithic integration of evanescent-coupled Ge-on-SOI photodetector on Si CMOS platform
title_short Low thermal budget monolithic integration of evanescent-coupled Ge-on-SOI photodetector on Si CMOS platform
title_full Low thermal budget monolithic integration of evanescent-coupled Ge-on-SOI photodetector on Si CMOS platform
title_fullStr Low thermal budget monolithic integration of evanescent-coupled Ge-on-SOI photodetector on Si CMOS platform
title_full_unstemmed Low thermal budget monolithic integration of evanescent-coupled Ge-on-SOI photodetector on Si CMOS platform
title_sort low thermal budget monolithic integration of evanescent-coupled ge-on-soi photodetector on si cmos platform
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/82631
_version_ 1781784186945798144

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