Metal-insulator-metal capacitors using atomic-layer-deposited Al 2O3/HfO2/Al2O3 sandwiched dielectrics for wireless communications
10.1116/1.2357746
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2014
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sg-nus-scholar.10635-826852023-10-30T20:19:38Z Metal-insulator-metal capacitors using atomic-layer-deposited Al 2O3/HfO2/Al2O3 sandwiched dielectrics for wireless communications Ding, S.-J. Huang, Y.-J. Li, Y. Zhang, D.W. Zhu, C. Li, M.-F. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.2357746 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 24 6 2518-2522 JVTBD 2014-10-07T04:32:18Z 2014-10-07T04:32:18Z 2006 Article Ding, S.-J., Huang, Y.-J., Li, Y., Zhang, D.W., Zhu, C., Li, M.-F. (2006). Metal-insulator-metal capacitors using atomic-layer-deposited Al 2O3/HfO2/Al2O3 sandwiched dielectrics for wireless communications. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 24 (6) : 2518-2522. ScholarBank@NUS Repository. https://doi.org/10.1116/1.2357746 10711023 http://scholarbank.nus.edu.sg/handle/10635/82685 000243324400005 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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| description |
10.1116/1.2357746 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Ding, S.-J. Huang, Y.-J. Li, Y. Zhang, D.W. Zhu, C. Li, M.-F. |
| format |
Article |
| author |
Ding, S.-J. Huang, Y.-J. Li, Y. Zhang, D.W. Zhu, C. Li, M.-F. |
| spellingShingle |
Ding, S.-J. Huang, Y.-J. Li, Y. Zhang, D.W. Zhu, C. Li, M.-F. Metal-insulator-metal capacitors using atomic-layer-deposited Al 2O3/HfO2/Al2O3 sandwiched dielectrics for wireless communications |
| author_sort |
Ding, S.-J. |
| title |
Metal-insulator-metal capacitors using atomic-layer-deposited Al 2O3/HfO2/Al2O3 sandwiched dielectrics for wireless communications |
| title_short |
Metal-insulator-metal capacitors using atomic-layer-deposited Al 2O3/HfO2/Al2O3 sandwiched dielectrics for wireless communications |
| title_full |
Metal-insulator-metal capacitors using atomic-layer-deposited Al 2O3/HfO2/Al2O3 sandwiched dielectrics for wireless communications |
| title_fullStr |
Metal-insulator-metal capacitors using atomic-layer-deposited Al 2O3/HfO2/Al2O3 sandwiched dielectrics for wireless communications |
| title_full_unstemmed |
Metal-insulator-metal capacitors using atomic-layer-deposited Al 2O3/HfO2/Al2O3 sandwiched dielectrics for wireless communications |
| title_sort |
metal-insulator-metal capacitors using atomic-layer-deposited al 2o3/hfo2/al2o3 sandwiched dielectrics for wireless communications |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82685 |
| _version_ |
1781784199501447168 |