Evidence and understanding of ALD HfO2-Al2O3 laminate MIM capacitors outperforming sandwich counterparts

Evidence and understanding of ALD HfO2-Al2O3 laminate MIM capacitors outperforming sandwich counterparts

10.1109/LED.2004.835791

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Bibliographic Details
Main Authors: Ding, S.-J., Hu, H., Zhu, C., Li, M.F., Kim, S.J., Cho, B.J., Chan, D.S.H., Yu, M.B., Du, A.Y., Chin, A., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82303
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/82303

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