Evidence and understanding of ALD HfO2-Al2O3 laminate MIM capacitors outperforming sandwich counterparts

10.1109/LED.2004.835791

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Bibliographic Details
Main Authors:	Ding, S.-J., Hu, H., Zhu, C., Li, M.F., Kim, S.J., Cho, B.J., Chan, D.S.H., Yu, M.B., Du, A.Y., Chin, A., Kwong, D.-L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82303
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82303
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spelling	sg-nus-scholar.10635-823032024-11-14T01:25:03Z Evidence and understanding of ALD HfO2-Al2O3 laminate MIM capacitors outperforming sandwich counterparts Ding, S.-J. Hu, H. Zhu, C. Li, M.F. Kim, S.J. Cho, B.J. Chan, D.S.H. Yu, M.B. Du, A.Y. Chin, A. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING 10.1109/LED.2004.835791 IEEE Electron Device Letters 25 10 681-683 EDLED 2014-10-07T04:27:47Z 2014-10-07T04:27:47Z 2004-10 Article Ding, S.-J., Hu, H., Zhu, C., Li, M.F., Kim, S.J., Cho, B.J., Chan, D.S.H., Yu, M.B., Du, A.Y., Chin, A., Kwong, D.-L. (2004-10). Evidence and understanding of ALD HfO2-Al2O3 laminate MIM capacitors outperforming sandwich counterparts. IEEE Electron Device Letters 25 (10) : 681-683. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2004.835791 07413106 http://scholarbank.nus.edu.sg/handle/10635/82303 000224106900005 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1109/LED.2004.835791
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Ding, S.-J. Hu, H. Zhu, C. Li, M.F. Kim, S.J. Cho, B.J. Chan, D.S.H. Yu, M.B. Du, A.Y. Chin, A. Kwong, D.-L.
format	Article
author	Ding, S.-J. Hu, H. Zhu, C. Li, M.F. Kim, S.J. Cho, B.J. Chan, D.S.H. Yu, M.B. Du, A.Y. Chin, A. Kwong, D.-L.
spellingShingle	Ding, S.-J. Hu, H. Zhu, C. Li, M.F. Kim, S.J. Cho, B.J. Chan, D.S.H. Yu, M.B. Du, A.Y. Chin, A. Kwong, D.-L. Evidence and understanding of ALD HfO2-Al2O3 laminate MIM capacitors outperforming sandwich counterparts
author_sort	Ding, S.-J.
title	Evidence and understanding of ALD HfO2-Al2O3 laminate MIM capacitors outperforming sandwich counterparts
title_short	Evidence and understanding of ALD HfO2-Al2O3 laminate MIM capacitors outperforming sandwich counterparts
title_full	Evidence and understanding of ALD HfO2-Al2O3 laminate MIM capacitors outperforming sandwich counterparts
title_fullStr	Evidence and understanding of ALD HfO2-Al2O3 laminate MIM capacitors outperforming sandwich counterparts
title_full_unstemmed	Evidence and understanding of ALD HfO2-Al2O3 laminate MIM capacitors outperforming sandwich counterparts
title_sort	evidence and understanding of ald hfo2-al2o3 laminate mim capacitors outperforming sandwich counterparts
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82303
_version_	1821216620854378496

Evidence and understanding of ALD HfO2-Al2O3 laminate MIM capacitors outperforming sandwich counterparts

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