Metal-insulator-metal RF bypass capacitor using niobium oxide (Nb2O5) with HfO2/Al2O3 barriers

10.1109/LED.2005.854378

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Bibliographic Details
Main Authors:	Kim, S.-J., Cho, B.J., Yu, M.B., Li, M.-F., Xiong, Y.-Z., Zhu, C., Chin, A., Kwong, D.-L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Bypass capacitor Decoupling capacitor High-κ dielectric Metal-insulator-metal (MIM) capacitor Niobium oxide (Nb2O5) Radio frequency integrated circuit (RF IC)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82686
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82686
record_format	dspace
spelling	sg-nus-scholar.10635-826862023-10-25T22:06:18Z Metal-insulator-metal RF bypass capacitor using niobium oxide (Nb2O5) with HfO2/Al2O3 barriers Kim, S.-J. Cho, B.J. Yu, M.B. Li, M.-F. Xiong, Y.-Z. Zhu, C. Chin, A. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING Bypass capacitor Decoupling capacitor High-κ dielectric Metal-insulator-metal (MIM) capacitor Niobium oxide (Nb2O5) Radio frequency integrated circuit (RF IC) 10.1109/LED.2005.854378 IEEE Electron Device Letters 26 9 625-627 EDLED 2014-10-07T04:32:19Z 2014-10-07T04:32:19Z 2005-09 Article Kim, S.-J., Cho, B.J., Yu, M.B., Li, M.-F., Xiong, Y.-Z., Zhu, C., Chin, A., Kwong, D.-L. (2005-09). Metal-insulator-metal RF bypass capacitor using niobium oxide (Nb2O5) with HfO2/Al2O3 barriers. IEEE Electron Device Letters 26 (9) : 625-627. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2005.854378 07413106 http://scholarbank.nus.edu.sg/handle/10635/82686 000231577900009 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Bypass capacitor Decoupling capacitor High-κ dielectric Metal-insulator-metal (MIM) capacitor Niobium oxide (Nb2O5) Radio frequency integrated circuit (RF IC)
spellingShingle	Bypass capacitor Decoupling capacitor High-κ dielectric Metal-insulator-metal (MIM) capacitor Niobium oxide (Nb2O5) Radio frequency integrated circuit (RF IC) Kim, S.-J. Cho, B.J. Yu, M.B. Li, M.-F. Xiong, Y.-Z. Zhu, C. Chin, A. Kwong, D.-L. Metal-insulator-metal RF bypass capacitor using niobium oxide (Nb2O5) with HfO2/Al2O3 barriers
description	10.1109/LED.2005.854378
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Kim, S.-J. Cho, B.J. Yu, M.B. Li, M.-F. Xiong, Y.-Z. Zhu, C. Chin, A. Kwong, D.-L.
format	Article
author	Kim, S.-J. Cho, B.J. Yu, M.B. Li, M.-F. Xiong, Y.-Z. Zhu, C. Chin, A. Kwong, D.-L.
author_sort	Kim, S.-J.
title	Metal-insulator-metal RF bypass capacitor using niobium oxide (Nb2O5) with HfO2/Al2O3 barriers
title_short	Metal-insulator-metal RF bypass capacitor using niobium oxide (Nb2O5) with HfO2/Al2O3 barriers
title_full	Metal-insulator-metal RF bypass capacitor using niobium oxide (Nb2O5) with HfO2/Al2O3 barriers
title_fullStr	Metal-insulator-metal RF bypass capacitor using niobium oxide (Nb2O5) with HfO2/Al2O3 barriers
title_full_unstemmed	Metal-insulator-metal RF bypass capacitor using niobium oxide (Nb2O5) with HfO2/Al2O3 barriers
title_sort	metal-insulator-metal rf bypass capacitor using niobium oxide (nb2o5) with hfo2/al2o3 barriers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82686
_version_	1781784199694385152

Metal-insulator-metal RF bypass capacitor using niobium oxide (Nb2O5) with HfO2/Al2O3 barriers

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