Modification of molybdenum gate electrode work function via (La-, Al-Induced) dipole effect at High-κ/SiO2 interface

10.1109/LED.2008.2000997

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Bibliographic Details
Main Authors:	Lim, A.E.-J., Lee, R.T.P., Samudra, G.S., Kwong, D.-L., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Al Interface dipole La Metal gate Mo Work function modification
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82717
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82717
record_format	dspace
spelling	sg-nus-scholar.10635-827172023-10-29T22:28:10Z Modification of molybdenum gate electrode work function via (La-, Al-Induced) dipole effect at High-κ/SiO2 interface Lim, A.E.-J. Lee, R.T.P. Samudra, G.S. Kwong, D.-L. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING Al Interface dipole La Metal gate Mo Work function modification 10.1109/LED.2008.2000997 IEEE Electron Device Letters 29 8 848-851 EDLED 2014-10-07T04:32:41Z 2014-10-07T04:32:41Z 2008-08 Article Lim, A.E.-J., Lee, R.T.P., Samudra, G.S., Kwong, D.-L., Yeo, Y.-C. (2008-08). Modification of molybdenum gate electrode work function via (La-, Al-Induced) dipole effect at High-κ/SiO2 interface. IEEE Electron Device Letters 29 (8) : 848-851. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2008.2000997 07413106 http://scholarbank.nus.edu.sg/handle/10635/82717 000258096000009 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Al Interface dipole La Metal gate Mo Work function modification
spellingShingle	Al Interface dipole La Metal gate Mo Work function modification Lim, A.E.-J. Lee, R.T.P. Samudra, G.S. Kwong, D.-L. Yeo, Y.-C. Modification of molybdenum gate electrode work function via (La-, Al-Induced) dipole effect at High-κ/SiO2 interface
description	10.1109/LED.2008.2000997
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lim, A.E.-J. Lee, R.T.P. Samudra, G.S. Kwong, D.-L. Yeo, Y.-C.
format	Article
author	Lim, A.E.-J. Lee, R.T.P. Samudra, G.S. Kwong, D.-L. Yeo, Y.-C.
author_sort	Lim, A.E.-J.
title	Modification of molybdenum gate electrode work function via (La-, Al-Induced) dipole effect at High-κ/SiO2 interface
title_short	Modification of molybdenum gate electrode work function via (La-, Al-Induced) dipole effect at High-κ/SiO2 interface
title_full	Modification of molybdenum gate electrode work function via (La-, Al-Induced) dipole effect at High-κ/SiO2 interface
title_fullStr	Modification of molybdenum gate electrode work function via (La-, Al-Induced) dipole effect at High-κ/SiO2 interface
title_full_unstemmed	Modification of molybdenum gate electrode work function via (La-, Al-Induced) dipole effect at High-κ/SiO2 interface
title_sort	modification of molybdenum gate electrode work function via (la-, al-induced) dipole effect at high-κ/sio2 interface
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82717
_version_	1781784206515372032

Modification of molybdenum gate electrode work function via (La-, Al-Induced) dipole effect at High-κ/SiO2 interface

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