Modification of molybdenum gate electrode work function via (La-, Al-Induced) dipole effect at High-κ/SiO2 interface

Modification of molybdenum gate electrode work function via (La-, Al-Induced) dipole effect at High-κ/SiO2 interface

10.1109/LED.2008.2000997

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Bibliographic Details
Main Authors: Lim, A.E.-J., Lee, R.T.P., Samudra, G.S., Kwong, D.-L., Yeo, Y.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Al
Interface dipole
La
Metal gate
Mo
Work function modification
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82717
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Institution: National University of Singapore

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