Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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Main Authors:	Poon, C.H., Cho, B.J., Lu, Y.F., Bhat, M., See, A.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82734
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82734
record_format	dspace
spelling	sg-nus-scholar.10635-827342015-01-09T03:10:38Z Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation Poon, C.H. Cho, B.J. Lu, Y.F. Bhat, M. See, A. ELECTRICAL & COMPUTER ENGINEERING Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 21 2 706-709 JVTBD 2014-10-07T04:32:52Z 2014-10-07T04:32:52Z 2003-03 Article Poon, C.H.,Cho, B.J.,Lu, Y.F.,Bhat, M.,See, A. (2003-03). Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 21 (2) : 706-709. ScholarBank@NUS Repository. 10711023 http://scholarbank.nus.edu.sg/handle/10635/82734 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Poon, C.H. Cho, B.J. Lu, Y.F. Bhat, M. See, A.
format	Article
author	Poon, C.H. Cho, B.J. Lu, Y.F. Bhat, M. See, A.
spellingShingle	Poon, C.H. Cho, B.J. Lu, Y.F. Bhat, M. See, A. Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation
author_sort	Poon, C.H.
title	Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation
title_short	Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation
title_full	Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation
title_fullStr	Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation
title_full_unstemmed	Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation
title_sort	multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82734
_version_	1681089306525958144

Multiple-pulse laser annealing of preamorphized silicon for ultrashallow boron junction formation

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