Phase change liner stressor for strain engineering of P-channel FinFETs
10.1109/TED.2013.2271643
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2014
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sg-nus-scholar.10635-828842023-10-30T08:01:03Z Phase change liner stressor for strain engineering of P-channel FinFETs Ding, Y. Cheng, R. Koh, S.-M. Liu, B. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING FinFET Ge2Sb2Te5 (GST) Multigate FET Phase change Strai 10.1109/TED.2013.2271643 IEEE Transactions on Electron Devices 60 9 2703-2711 IETDA 2014-10-07T04:34:38Z 2014-10-07T04:34:38Z 2013 Article Ding, Y., Cheng, R., Koh, S.-M., Liu, B., Yeo, Y.-C. (2013). Phase change liner stressor for strain engineering of P-channel FinFETs. IEEE Transactions on Electron Devices 60 (9) : 2703-2711. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2013.2271643 00189383 http://scholarbank.nus.edu.sg/handle/10635/82884 000323640300001 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
FinFET Ge2Sb2Te5 (GST) Multigate FET Phase change Strai |
| spellingShingle |
FinFET Ge2Sb2Te5 (GST) Multigate FET Phase change Strai Ding, Y. Cheng, R. Koh, S.-M. Liu, B. Yeo, Y.-C. Phase change liner stressor for strain engineering of P-channel FinFETs |
| description |
10.1109/TED.2013.2271643 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Ding, Y. Cheng, R. Koh, S.-M. Liu, B. Yeo, Y.-C. |
| format |
Article |
| author |
Ding, Y. Cheng, R. Koh, S.-M. Liu, B. Yeo, Y.-C. |
| author_sort |
Ding, Y. |
| title |
Phase change liner stressor for strain engineering of P-channel FinFETs |
| title_short |
Phase change liner stressor for strain engineering of P-channel FinFETs |
| title_full |
Phase change liner stressor for strain engineering of P-channel FinFETs |
| title_fullStr |
Phase change liner stressor for strain engineering of P-channel FinFETs |
| title_full_unstemmed |
Phase change liner stressor for strain engineering of P-channel FinFETs |
| title_sort |
phase change liner stressor for strain engineering of p-channel finfets |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/82884 |
| _version_ |
1781784244985528320 |