Phase change liner stressor for strain engineering of P-channel FinFETs
10.1109/TED.2013.2271643
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Main Authors: | Ding, Y., Cheng, R., Koh, S.-M., Liu, B., Yeo, Y.-C. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82884 |
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Institution: | National University of Singapore |
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