Metrology solutions for high performance germanium multi-gate field-effect transistors using optical scatterometry

10.1117/12.2013413

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Bibliographic Details
Main Authors: Chin, H.-C., Ling, M.-L., Liu, B., Zhang, X., Li, J., Liu, Y., Hu, J., Yeo, Y.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
OCD
Online Access:http://scholarbank.nus.edu.sg/handle/10635/70922
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Institution: National University of Singapore