Raman spectroscopy investigation on excimer laser annealing and thickness determination of nanoscale amorphous silicon

10.1088/0957-4484/15/5/043

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Bibliographic Details
Main Authors:	Zeng, Y.P., Lu, Y.F., Shen, Z.X., Sun, W.X., Yu, T., Liu, L., Zeng, J.N., Cho, B.J., Poon, C.H.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82961
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82961
record_format	dspace
spelling	sg-nus-scholar.10635-829612023-10-30T07:59:43Z Raman spectroscopy investigation on excimer laser annealing and thickness determination of nanoscale amorphous silicon Zeng, Y.P. Lu, Y.F. Shen, Z.X. Sun, W.X. Yu, T. Liu, L. Zeng, J.N. Cho, B.J. Poon, C.H. PHYSICS ELECTRICAL & COMPUTER ENGINEERING 10.1088/0957-4484/15/5/043 Nanotechnology 15 5 658-662 NNOTE 2014-10-07T04:35:34Z 2014-10-07T04:35:34Z 2004-05 Article Zeng, Y.P., Lu, Y.F., Shen, Z.X., Sun, W.X., Yu, T., Liu, L., Zeng, J.N., Cho, B.J., Poon, C.H. (2004-05). Raman spectroscopy investigation on excimer laser annealing and thickness determination of nanoscale amorphous silicon. Nanotechnology 15 (5) : 658-662. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-4484/15/5/043 09574484 http://scholarbank.nus.edu.sg/handle/10635/82961 000221679800044 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1088/0957-4484/15/5/043
author2	PHYSICS
author_facet	PHYSICS Zeng, Y.P. Lu, Y.F. Shen, Z.X. Sun, W.X. Yu, T. Liu, L. Zeng, J.N. Cho, B.J. Poon, C.H.
format	Article
author	Zeng, Y.P. Lu, Y.F. Shen, Z.X. Sun, W.X. Yu, T. Liu, L. Zeng, J.N. Cho, B.J. Poon, C.H.
spellingShingle	Zeng, Y.P. Lu, Y.F. Shen, Z.X. Sun, W.X. Yu, T. Liu, L. Zeng, J.N. Cho, B.J. Poon, C.H. Raman spectroscopy investigation on excimer laser annealing and thickness determination of nanoscale amorphous silicon
author_sort	Zeng, Y.P.
title	Raman spectroscopy investigation on excimer laser annealing and thickness determination of nanoscale amorphous silicon
title_short	Raman spectroscopy investigation on excimer laser annealing and thickness determination of nanoscale amorphous silicon
title_full	Raman spectroscopy investigation on excimer laser annealing and thickness determination of nanoscale amorphous silicon
title_fullStr	Raman spectroscopy investigation on excimer laser annealing and thickness determination of nanoscale amorphous silicon
title_full_unstemmed	Raman spectroscopy investigation on excimer laser annealing and thickness determination of nanoscale amorphous silicon
title_sort	raman spectroscopy investigation on excimer laser annealing and thickness determination of nanoscale amorphous silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82961
_version_	1781784261767987200

Raman spectroscopy investigation on excimer laser annealing and thickness determination of nanoscale amorphous silicon

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