Raman spectroscopy investigation on excimer laser annealing and thickness determination of nanoscale amorphous silicon
10.1088/0957-4484/15/5/043
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Main Authors: | Zeng, Y.P., Lu, Y.F., Shen, Z.X., Sun, W.X., Yu, T., Liu, L., Zeng, J.N., Cho, B.J., Poon, C.H. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82961 |
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Institution: | National University of Singapore |
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