SiGe amorphization during Ge condensation in silicon germanium on insulator

SiGe amorphization during Ge condensation in silicon germanium on insulator

10.1063/1.2222341

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Bibliographic Details
Main Authors: Balakumar, S., Lo, G.Q., Tung, C.H., Kumar, R., Balasubramanian, N., Kwong, D.L., Ong, C.S., Li, M.F.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83015
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Institution: National University of Singapore
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Summary:10.1063/1.2222341

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