Some issues in advanced CMOS gate stack performance and reliability

10.1016/j.mee.2009.08.013

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Bibliographic Details
Main Authors:	Li, M.-F., Wang, X.P., Shen, C., Yang, J.J., Chen, J.D., Yu, H.Y., Zhu, C., Huang, D.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	CMOS Gate Stack Reliability
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83036
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83036
record_format	dspace
spelling	sg-nus-scholar.10635-830362023-10-26T20:36:38Z Some issues in advanced CMOS gate stack performance and reliability Li, M.-F. Wang, X.P. Shen, C. Yang, J.J. Chen, J.D. Yu, H.Y. Zhu, C. Huang, D. ELECTRICAL & COMPUTER ENGINEERING CMOS Gate Stack Reliability 10.1016/j.mee.2009.08.013 Microelectronic Engineering 88 12 3377-3384 MIENE 2014-10-07T04:36:31Z 2014-10-07T04:36:31Z 2011-12 Article Li, M.-F., Wang, X.P., Shen, C., Yang, J.J., Chen, J.D., Yu, H.Y., Zhu, C., Huang, D. (2011-12). Some issues in advanced CMOS gate stack performance and reliability. Microelectronic Engineering 88 (12) : 3377-3384. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2009.08.013 01679317 http://scholarbank.nus.edu.sg/handle/10635/83036 000299062200001 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	CMOS Gate Stack Reliability
spellingShingle	CMOS Gate Stack Reliability Li, M.-F. Wang, X.P. Shen, C. Yang, J.J. Chen, J.D. Yu, H.Y. Zhu, C. Huang, D. Some issues in advanced CMOS gate stack performance and reliability
description	10.1016/j.mee.2009.08.013
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Li, M.-F. Wang, X.P. Shen, C. Yang, J.J. Chen, J.D. Yu, H.Y. Zhu, C. Huang, D.
format	Article
author	Li, M.-F. Wang, X.P. Shen, C. Yang, J.J. Chen, J.D. Yu, H.Y. Zhu, C. Huang, D.
author_sort	Li, M.-F.
title	Some issues in advanced CMOS gate stack performance and reliability
title_short	Some issues in advanced CMOS gate stack performance and reliability
title_full	Some issues in advanced CMOS gate stack performance and reliability
title_fullStr	Some issues in advanced CMOS gate stack performance and reliability
title_full_unstemmed	Some issues in advanced CMOS gate stack performance and reliability
title_sort	some issues in advanced cmos gate stack performance and reliability
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83036
_version_	1781784281251577856

Some issues in advanced CMOS gate stack performance and reliability

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