Some issues in advanced CMOS gate stack performance and reliability

Some issues in advanced CMOS gate stack performance and reliability

10.1016/j.mee.2009.08.013

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Bibliographic Details
Main Authors: Li, M.-F., Wang, X.P., Shen, C., Yang, J.J., Chen, J.D., Yu, H.Y., Zhu, C., Huang, D.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
CMOS
Gate Stack
Reliability
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83036
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Institution: National University of Singapore

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