Structural characterisation of polycrystalline SiGe thin film

10.1016/S0038-1101(01)00241-6

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Bibliographic Details
Main Authors:	Teh, L.K., Choi, W.K., Bera, L.K., Chim, W.K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Polycrystalline silicon-germanium films Radio frequency sputtering Silicon-germanium
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83097
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83097
record_format	dspace
spelling	sg-nus-scholar.10635-830972023-10-27T07:22:55Z Structural characterisation of polycrystalline SiGe thin film Teh, L.K. Choi, W.K. Bera, L.K. Chim, W.K. ELECTRICAL & COMPUTER ENGINEERING Polycrystalline silicon-germanium films Radio frequency sputtering Silicon-germanium 10.1016/S0038-1101(01)00241-6 Solid-State Electronics 45 11 1963-1966 SSELA 2014-10-07T04:37:14Z 2014-10-07T04:37:14Z 2001-11 Article Teh, L.K., Choi, W.K., Bera, L.K., Chim, W.K. (2001-11). Structural characterisation of polycrystalline SiGe thin film. Solid-State Electronics 45 (11) : 1963-1966. ScholarBank@NUS Repository. https://doi.org/10.1016/S0038-1101(01)00241-6 00381101 http://scholarbank.nus.edu.sg/handle/10635/83097 000172273900018 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Polycrystalline silicon-germanium films Radio frequency sputtering Silicon-germanium
spellingShingle	Polycrystalline silicon-germanium films Radio frequency sputtering Silicon-germanium Teh, L.K. Choi, W.K. Bera, L.K. Chim, W.K. Structural characterisation of polycrystalline SiGe thin film
description	10.1016/S0038-1101(01)00241-6
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Teh, L.K. Choi, W.K. Bera, L.K. Chim, W.K.
format	Article
author	Teh, L.K. Choi, W.K. Bera, L.K. Chim, W.K.
author_sort	Teh, L.K.
title	Structural characterisation of polycrystalline SiGe thin film
title_short	Structural characterisation of polycrystalline SiGe thin film
title_full	Structural characterisation of polycrystalline SiGe thin film
title_fullStr	Structural characterisation of polycrystalline SiGe thin film
title_full_unstemmed	Structural characterisation of polycrystalline SiGe thin film
title_sort	structural characterisation of polycrystalline sige thin film
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83097
_version_	1781784300870434816

Structural characterisation of polycrystalline SiGe thin film

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