The electrical and material properties of HfO xN y dielectric on germanium substrate

The electrical and material properties of HfO xN y dielectric on germanium substrate

10.1143/JJAP.43.L1208

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Bibliographic Details
Main Authors: Zhang, Q., Wu, N., Zhu, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
Annealing
Deposition
Germanium
Hafnium oxynitride
MOS capacitor
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83170
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-831702023-10-26T20:37:07Z The electrical and material properties of HfO xN y dielectric on germanium substrate Zhang, Q. Wu, N. Zhu, C. ELECTRICAL & COMPUTER ENGINEERING Annealing Deposition Germanium Hafnium oxynitride MOS capacitor 10.1143/JJAP.43.L1208 Japanese Journal of Applied Physics, Part 2: Letters 43 9 AB L1208-L1210 JAPLD 2014-10-07T04:38:07Z 2014-10-07T04:38:07Z 2004-09-15 Article Zhang, Q., Wu, N., Zhu, C. (2004-09-15). The electrical and material properties of HfO xN y dielectric on germanium substrate. Japanese Journal of Applied Physics, Part 2: Letters 43 (9 AB) : L1208-L1210. ScholarBank@NUS Repository. https://doi.org/10.1143/JJAP.43.L1208 00214922 http://scholarbank.nus.edu.sg/handle/10635/83170 000224441000027 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Annealing
Deposition
Germanium
Hafnium oxynitride
MOS capacitor
spellingShingle Annealing
Deposition
Germanium
Hafnium oxynitride
MOS capacitor
Zhang, Q.
Wu, N.
Zhu, C.
The electrical and material properties of HfO xN y dielectric on germanium substrate
description 10.1143/JJAP.43.L1208
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Zhang, Q.
Wu, N.
Zhu, C.
format Article
author Zhang, Q.
Wu, N.
Zhu, C.
author_sort Zhang, Q.
title The electrical and material properties of HfO xN y dielectric on germanium substrate
title_short The electrical and material properties of HfO xN y dielectric on germanium substrate
title_full The electrical and material properties of HfO xN y dielectric on germanium substrate
title_fullStr The electrical and material properties of HfO xN y dielectric on germanium substrate
title_full_unstemmed The electrical and material properties of HfO xN y dielectric on germanium substrate
title_sort electrical and material properties of hfo xn y dielectric on germanium substrate
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83170
_version_ 1781784319845466112

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