Ultimate resolution limits for scanning electron microscope immersion objective lenses

Optik (Jena)

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Main Author: Khursheed, A.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/83238
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-832382015-01-29T07:21:13Z Ultimate resolution limits for scanning electron microscope immersion objective lenses Khursheed, A. ELECTRICAL & COMPUTER ENGINEERING Low voltage scanning electron microscopy Optik (Jena) 113 2 67-77 OTIKA 2014-10-07T04:38:55Z 2014-10-07T04:38:55Z 2002 Article Khursheed, A. (2002). Ultimate resolution limits for scanning electron microscope immersion objective lenses. Optik (Jena) 113 (2) : 67-77. ScholarBank@NUS Repository. 00304026 http://scholarbank.nus.edu.sg/handle/10635/83238 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Low voltage scanning electron microscopy
spellingShingle Low voltage scanning electron microscopy
Khursheed, A.
Ultimate resolution limits for scanning electron microscope immersion objective lenses
description Optik (Jena)
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Khursheed, A.
format Article
author Khursheed, A.
author_sort Khursheed, A.
title Ultimate resolution limits for scanning electron microscope immersion objective lenses
title_short Ultimate resolution limits for scanning electron microscope immersion objective lenses
title_full Ultimate resolution limits for scanning electron microscope immersion objective lenses
title_fullStr Ultimate resolution limits for scanning electron microscope immersion objective lenses
title_full_unstemmed Ultimate resolution limits for scanning electron microscope immersion objective lenses
title_sort ultimate resolution limits for scanning electron microscope immersion objective lenses
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83238
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