Ultimate resolution limits for scanning electron microscope immersion objective lenses
Optik (Jena)
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Main Author: | Khursheed, A. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83238 |
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Institution: | National University of Singapore |
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