Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon

Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon

10.1039/c2nr32350h

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Bibliographic Details
Main Authors: Lianto, P., Yu, S., Wu, J., Thompson, C.V., Choi, W.K.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83257
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Institution: National University of Singapore
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Summary:10.1039/c2nr32350h

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