Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon

10.1039/c2nr32350h

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Bibliographic Details
Main Authors:	Lianto, P., Yu, S., Wu, J., Thompson, C.V., Choi, W.K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83257
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Institution:	National University of Singapore

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