Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon
10.1039/c2nr32350h
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Main Authors: | Lianto, P., Yu, S., Wu, J., Thompson, C.V., Choi, W.K. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83257 |
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Institution: | National University of Singapore |
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