Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon

10.1039/c2nr32350h

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Bibliographic Details
Main Authors:	Lianto, P., Yu, S., Wu, J., Thompson, C.V., Choi, W.K.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83257
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83257
record_format	dspace
spelling	sg-nus-scholar.10635-832572024-11-09T00:15:40Z Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon Lianto, P. Yu, S. Wu, J. Thompson, C.V. Choi, W.K. ELECTRICAL & COMPUTER ENGINEERING 10.1039/c2nr32350h Nanoscale 4 23 7532-7539 2014-10-07T04:39:08Z 2014-10-07T04:39:08Z 2012-12-07 Article Lianto, P., Yu, S., Wu, J., Thompson, C.V., Choi, W.K. (2012-12-07). Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon. Nanoscale 4 (23) : 7532-7539. ScholarBank@NUS Repository. https://doi.org/10.1039/c2nr32350h 20403364 http://scholarbank.nus.edu.sg/handle/10635/83257 000310978900036 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1039/c2nr32350h
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lianto, P. Yu, S. Wu, J. Thompson, C.V. Choi, W.K.
format	Article
author	Lianto, P. Yu, S. Wu, J. Thompson, C.V. Choi, W.K.
spellingShingle	Lianto, P. Yu, S. Wu, J. Thompson, C.V. Choi, W.K. Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon
author_sort	Lianto, P.
title	Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon
title_short	Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon
title_full	Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon
title_fullStr	Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon
title_full_unstemmed	Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon
title_sort	vertical etching with isolated catalysts in metal-assisted chemical etching of silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83257
_version_	1821181163765497856

Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon

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