X-ray photoemission spectroscopy study of silicidation of Ti on BF2 +-implanted polysilicon
10.1116/1.1421565
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2014
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sg-nus-scholar.10635-832812023-10-30T20:09:28Z X-ray photoemission spectroscopy study of silicidation of Ti on BF2 +-implanted polysilicon Chua, H.N. Pey, K.L. Lai, W.H. Chai, J.W. Pan, J.S. Chua, D.H.C. Siah, S.Y. ELECTRICAL & COMPUTER ENGINEERING 10.1116/1.1421565 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 19 6 2252-2257 JVTBD 2014-10-07T04:39:28Z 2014-10-07T04:39:28Z 2001-11 Article Chua, H.N., Pey, K.L., Lai, W.H., Chai, J.W., Pan, J.S., Chua, D.H.C., Siah, S.Y. (2001-11). X-ray photoemission spectroscopy study of silicidation of Ti on BF2 +-implanted polysilicon. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 19 (6) : 2252-2257. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1421565 10711023 http://scholarbank.nus.edu.sg/handle/10635/83281 000173159900041 Scopus |
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National University of Singapore |
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NUS Library |
| continent |
Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1116/1.1421565 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Chua, H.N. Pey, K.L. Lai, W.H. Chai, J.W. Pan, J.S. Chua, D.H.C. Siah, S.Y. |
| format |
Article |
| author |
Chua, H.N. Pey, K.L. Lai, W.H. Chai, J.W. Pan, J.S. Chua, D.H.C. Siah, S.Y. |
| spellingShingle |
Chua, H.N. Pey, K.L. Lai, W.H. Chai, J.W. Pan, J.S. Chua, D.H.C. Siah, S.Y. X-ray photoemission spectroscopy study of silicidation of Ti on BF2 +-implanted polysilicon |
| author_sort |
Chua, H.N. |
| title |
X-ray photoemission spectroscopy study of silicidation of Ti on BF2 +-implanted polysilicon |
| title_short |
X-ray photoemission spectroscopy study of silicidation of Ti on BF2 +-implanted polysilicon |
| title_full |
X-ray photoemission spectroscopy study of silicidation of Ti on BF2 +-implanted polysilicon |
| title_fullStr |
X-ray photoemission spectroscopy study of silicidation of Ti on BF2 +-implanted polysilicon |
| title_full_unstemmed |
X-ray photoemission spectroscopy study of silicidation of Ti on BF2 +-implanted polysilicon |
| title_sort |
x-ray photoemission spectroscopy study of silicidation of ti on bf2 +-implanted polysilicon |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83281 |
| _version_ |
1781784349543235584 |