X-ray photoemission spectroscopy study of silicidation of Ti on BF2 +-implanted polysilicon

10.1116/1.1421565

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Bibliographic Details
Main Authors:	Chua, H.N., Pey, K.L., Lai, W.H., Chai, J.W., Pan, J.S., Chua, D.H.C., Siah, S.Y.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83281
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Institution:	National University of Singapore

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