A comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer

A comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer

Materials Research Society Symposium - Proceedings

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Main Authors: Tan, W.L., Pey, K.L., Chooi, S.Y.M., Ye, J.H.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83341
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-833412015-01-08T19:20:10Z A comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer Tan, W.L. Pey, K.L. Chooi, S.Y.M. Ye, J.H. ELECTRICAL & COMPUTER ENGINEERING CHEMICAL & ENVIRONMENTAL ENGINEERING Materials Research Society Symposium - Proceedings 670 K661-K666 MRSPD 2014-10-07T04:40:08Z 2014-10-07T04:40:08Z 2001 Conference Paper Tan, W.L.,Pey, K.L.,Chooi, S.Y.M.,Ye, J.H. (2001). A comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer. Materials Research Society Symposium - Proceedings 670 : K661-K666. ScholarBank@NUS Repository. 02729172 http://scholarbank.nus.edu.sg/handle/10635/83341 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Materials Research Society Symposium - Proceedings
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Tan, W.L.
Pey, K.L.
Chooi, S.Y.M.
Ye, J.H.
format Conference or Workshop Item
author Tan, W.L.
Pey, K.L.
Chooi, S.Y.M.
Ye, J.H.
spellingShingle Tan, W.L.
Pey, K.L.
Chooi, S.Y.M.
Ye, J.H.
A comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer
author_sort Tan, W.L.
title A comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer
title_short A comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer
title_full A comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer
title_fullStr A comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer
title_full_unstemmed A comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer
title_sort comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83341
_version_ 1681089418068230144

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