A comparative study of nickel silicide formation using a titanium cap layer and a titanium interlayer
Materials Research Society Symposium - Proceedings
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Main Authors: | Tan, W.L., Pey, K.L., Chooi, S.Y.M., Ye, J.H. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83341 |
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Institution: | National University of Singapore |
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