A novel program-erasable capacitor using high-κ AlN dielectric

A novel program-erasable capacitor using high-κ AlN dielectric

10.1109/DRC.2004.1367791

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Bibliographic Details
Main Authors: Lai, C.H., Ma, M.W., Cheng, C.F., Chin, A., McAlister, S.P., Zhu, C.X., Li, M.-F., Kwong, D.L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83403
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/83403

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