CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers

10.1109/MEMSYS.2013.6474270

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Main Authors:	Zhou, H., Kropelnicki, P., Tsai, J.M., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83552
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83552
record_format	dspace
spelling	sg-nus-scholar.10635-835522015-01-21T05:49:47Z CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers Zhou, H. Kropelnicki, P. Tsai, J.M. Lee, C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/MEMSYS.2013.6474270 Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 429-432 PMEME 2014-10-07T04:42:30Z 2014-10-07T04:42:30Z 2013 Conference Paper Zhou, H.,Kropelnicki, P.,Tsai, J.M.,Lee, C. (2013). CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) : 429-432. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/MEMSYS.2013.6474270" target="_blank">https://doi.org/10.1109/MEMSYS.2013.6474270</a> 9781467356558 10846999 http://scholarbank.nus.edu.sg/handle/10635/83552 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1109/MEMSYS.2013.6474270
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Zhou, H. Kropelnicki, P. Tsai, J.M. Lee, C.
format	Conference or Workshop Item
author	Zhou, H. Kropelnicki, P. Tsai, J.M. Lee, C.
spellingShingle	Zhou, H. Kropelnicki, P. Tsai, J.M. Lee, C. CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers
author_sort	Zhou, H.
title	CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers
title_short	CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers
title_full	CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers
title_fullStr	CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers
title_full_unstemmed	CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers
title_sort	cmos-based thermopiles using vertically integrated double polycrystalline silicon layers
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83552
_version_	1681089456946282496

CMOS-based thermopiles using vertically integrated double polycrystalline silicon layers

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