Defect suppression of indium end-of-range during solid phase epitaxy annealing using Si1-yCy in silicon

10.1016/j.tsf.2005.09.157

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Bibliographic Details
Main Authors:	Tan, C.F., Chor, E.F., Lee, H., Liu, J., Quek, E., Chan, L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	End-of-range Indium Solid phase epitaxial regrowth
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83603
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83603
record_format	dspace
spelling	sg-nus-scholar.10635-836032024-11-14T00:57:49Z Defect suppression of indium end-of-range during solid phase epitaxy annealing using Si1-yCy in silicon Tan, C.F. Chor, E.F. Lee, H. Liu, J. Quek, E. Chan, L. ELECTRICAL & COMPUTER ENGINEERING End-of-range Indium Solid phase epitaxial regrowth 10.1016/j.tsf.2005.09.157 Thin Solid Films 504 1-2 132-135 THSFA 2014-10-07T04:43:04Z 2014-10-07T04:43:04Z 2006-05-10 Conference Paper Tan, C.F., Chor, E.F., Lee, H., Liu, J., Quek, E., Chan, L. (2006-05-10). Defect suppression of indium end-of-range during solid phase epitaxy annealing using Si1-yCy in silicon. Thin Solid Films 504 (1-2) : 132-135. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2005.09.157 00406090 http://scholarbank.nus.edu.sg/handle/10635/83603 000236486200032 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	End-of-range Indium Solid phase epitaxial regrowth
spellingShingle	End-of-range Indium Solid phase epitaxial regrowth Tan, C.F. Chor, E.F. Lee, H. Liu, J. Quek, E. Chan, L. Defect suppression of indium end-of-range during solid phase epitaxy annealing using Si1-yCy in silicon
description	10.1016/j.tsf.2005.09.157
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tan, C.F. Chor, E.F. Lee, H. Liu, J. Quek, E. Chan, L.
format	Conference or Workshop Item
author	Tan, C.F. Chor, E.F. Lee, H. Liu, J. Quek, E. Chan, L.
author_sort	Tan, C.F.
title	Defect suppression of indium end-of-range during solid phase epitaxy annealing using Si1-yCy in silicon
title_short	Defect suppression of indium end-of-range during solid phase epitaxy annealing using Si1-yCy in silicon
title_full	Defect suppression of indium end-of-range during solid phase epitaxy annealing using Si1-yCy in silicon
title_fullStr	Defect suppression of indium end-of-range during solid phase epitaxy annealing using Si1-yCy in silicon
title_full_unstemmed	Defect suppression of indium end-of-range during solid phase epitaxy annealing using Si1-yCy in silicon
title_sort	defect suppression of indium end-of-range during solid phase epitaxy annealing using si1-ycy in silicon
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83603
_version_	1821197238590767104

Defect suppression of indium end-of-range during solid phase epitaxy annealing using Si1-yCy in silicon

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