Defect suppression of indium end-of-range during solid phase epitaxy annealing using Si1-yCy in silicon

• Main Authors: Tan, C.F., Chor, E.F., Lee, H., Liu, J., Quek, E., Chan, L.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: End-of-range; Indium; Solid phase epitaxial regrowth
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83603
• Institution: National University of Singapore

10.1016/j.tsf.2005.09.157