Dry etching of LiNbO3 using inductively coupled Plasma
10.1109/PGC.2010.5706006
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2014
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sg-nus-scholar.10635-836502024-11-08T20:04:18Z Dry etching of LiNbO3 using inductively coupled Plasma Deng, J. Si, G. Danner, A.J. ELECTRICAL & COMPUTER ENGINEERING 10.1109/PGC.2010.5706006 2010 Photonics Global Conference, PGC 2010 - 2014-10-07T04:43:37Z 2014-10-07T04:43:37Z 2010 Conference Paper Deng, J.,Si, G.,Danner, A.J. (2010). Dry etching of LiNbO3 using inductively coupled Plasma. 2010 Photonics Global Conference, PGC 2010 : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/PGC.2010.5706006" target="_blank">https://doi.org/10.1109/PGC.2010.5706006</a> 9781424498826 http://scholarbank.nus.edu.sg/handle/10635/83650 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
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NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| description |
10.1109/PGC.2010.5706006 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Deng, J. Si, G. Danner, A.J. |
| format |
Conference or Workshop Item |
| author |
Deng, J. Si, G. Danner, A.J. |
| spellingShingle |
Deng, J. Si, G. Danner, A.J. Dry etching of LiNbO3 using inductively coupled Plasma |
| author_sort |
Deng, J. |
| title |
Dry etching of LiNbO3 using inductively coupled Plasma |
| title_short |
Dry etching of LiNbO3 using inductively coupled Plasma |
| title_full |
Dry etching of LiNbO3 using inductively coupled Plasma |
| title_fullStr |
Dry etching of LiNbO3 using inductively coupled Plasma |
| title_full_unstemmed |
Dry etching of LiNbO3 using inductively coupled Plasma |
| title_sort |
dry etching of linbo3 using inductively coupled plasma |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/83650 |
| _version_ |
1821224519770046464 |