Impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-Si thin Films

Impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-Si thin Films

10.1557/opl.2011.932

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Bibliographic Details
Main Authors: Kumar, A., Widenborg, P.I., Hidayat, H., Qiu, Z., Aberie, A.G.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83818
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/83818

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