Impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-Si thin Films

10.1557/opl.2011.932

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Bibliographic Details
Main Authors:	Kumar, A., Widenborg, P.I., Hidayat, H., Qiu, Z., Aberie, A.G.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83818
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-838182015-01-07T04:42:00Z Impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-Si thin Films Kumar, A. Widenborg, P.I. Hidayat, H. Qiu, Z. Aberie, A.G. ELECTRICAL & COMPUTER ENGINEERING SOLAR ENERGY RESEARCH INST OF S'PORE 10.1557/opl.2011.932 Materials Research Society Symposium Proceedings 1321 173-178 MRSPD 2014-10-07T04:45:32Z 2014-10-07T04:45:32Z 2012 Conference Paper Kumar, A.,Widenborg, P.I.,Hidayat, H.,Qiu, Z.,Aberie, A.G. (2012). Impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-Si thin Films. Materials Research Society Symposium Proceedings 1321 : 173-178. ScholarBank@NUS Repository. <a href="https://doi.org/10.1557/opl.2011.932" target="_blank">https://doi.org/10.1557/opl.2011.932</a> 9781605112985 02729172 http://scholarbank.nus.edu.sg/handle/10635/83818 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	10.1557/opl.2011.932
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Kumar, A. Widenborg, P.I. Hidayat, H. Qiu, Z. Aberie, A.G.
format	Conference or Workshop Item
author	Kumar, A. Widenborg, P.I. Hidayat, H. Qiu, Z. Aberie, A.G.
spellingShingle	Kumar, A. Widenborg, P.I. Hidayat, H. Qiu, Z. Aberie, A.G. Impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-Si thin Films
author_sort	Kumar, A.
title	Impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-Si thin Films
title_short	Impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-Si thin Films
title_full	Impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-Si thin Films
title_fullStr	Impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-Si thin Films
title_full_unstemmed	Impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-Si thin Films
title_sort	impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-si thin films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83818
_version_	1681089505881227264

Impact of rapid thermal annealing and hydrogenation on the doping concentration and carrier mobility in solid phase crystallized poly-Si thin Films

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