Impact of surface roughness on silicon and Germanium ultra-thin-body MOSFETs

• Main Authors: Low, T., Li, M.F., Fan, W.J., Ng, S.T., Yeo, Y.-C., Zhu, C., Chin, A., Chan, L., Kwong, D.L.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/83819
• Institution: National University of Singapore

Technical Digest - International Electron Devices Meeting, IEDM