Manipulating interface dipoles of opposing polarity for work function engineering within a single metal gate stack

10.1109/IEDM.2008.4796606

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Bibliographic Details
Main Authors: Lim, A.E.-J., Hou, J., Kwong, D.-L., Yeo, Y.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83935
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Institution: National University of Singapore