Manipulating interface dipoles of opposing polarity for work function engineering within a single metal gate stack

10.1109/IEDM.2008.4796606

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Bibliographic Details
Main Authors:	Lim, A.E.-J., Hou, J., Kwong, D.-L., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83935
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83935
record_format	dspace
spelling	sg-nus-scholar.10635-839352024-11-08T16:45:27Z Manipulating interface dipoles of opposing polarity for work function engineering within a single metal gate stack Lim, A.E.-J. Hou, J. Kwong, D.-L. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IEDM.2008.4796606 Technical Digest - International Electron Devices Meeting, IEDM - TDIMD 2014-10-07T04:46:54Z 2014-10-07T04:46:54Z 2008 Conference Paper Lim, A.E.-J.,Hou, J.,Kwong, D.-L.,Yeo, Y.-C. (2008). Manipulating interface dipoles of opposing polarity for work function engineering within a single metal gate stack. Technical Digest - International Electron Devices Meeting, IEDM : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IEDM.2008.4796606" target="_blank">https://doi.org/10.1109/IEDM.2008.4796606</a> 9781424423781 01631918 http://scholarbank.nus.edu.sg/handle/10635/83935 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1109/IEDM.2008.4796606
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lim, A.E.-J. Hou, J. Kwong, D.-L. Yeo, Y.-C.
format	Conference or Workshop Item
author	Lim, A.E.-J. Hou, J. Kwong, D.-L. Yeo, Y.-C.
spellingShingle	Lim, A.E.-J. Hou, J. Kwong, D.-L. Yeo, Y.-C. Manipulating interface dipoles of opposing polarity for work function engineering within a single metal gate stack
author_sort	Lim, A.E.-J.
title	Manipulating interface dipoles of opposing polarity for work function engineering within a single metal gate stack
title_short	Manipulating interface dipoles of opposing polarity for work function engineering within a single metal gate stack
title_full	Manipulating interface dipoles of opposing polarity for work function engineering within a single metal gate stack
title_fullStr	Manipulating interface dipoles of opposing polarity for work function engineering within a single metal gate stack
title_full_unstemmed	Manipulating interface dipoles of opposing polarity for work function engineering within a single metal gate stack
title_sort	manipulating interface dipoles of opposing polarity for work function engineering within a single metal gate stack
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83935
_version_	1821207604946272256

Manipulating interface dipoles of opposing polarity for work function engineering within a single metal gate stack

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